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New PVD 200 E-Beam & Thermal Deposition System Installed at Nazarbayev University

20. Juli 2022 | Verfasser: KJLC Blog

PVD 200 E-Beam & Thermal Deposition System Installed at Nazarbayev University

A new PVD 200 e-beam and thermal deposition system was installed by us in the newly launched micro-and nano-fabrication facility at Nazarbayev University. Among other projects, the research group is working on the fabrication of various field-effect transistors (FETs), microwave kinetic inductance detectors (MKIDs) and other devices. The PVD 200 system will be used for metal lift-off processes and is equipped with an electron beam source and two thermal sources along with a load lock for fast processing. We're looking forward to hearing more about this project in the future!

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Schlagwörter:
Systeme Vakuumwissenschaft Depositionsverfahren



     
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