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Lesker U Live! is series of free webinars spanning many topics taught by leading vacuum experts.

Lesker U provides the following:

  • High-value vacuum expert training
  • A solid base of understanding surrounding vacuum technology
  • Deep dives on specific vacuum technology topics

Methods to Enhance Thickness Uniformity of Thin Films by Physical Vapor Deposition

Thickness uniformity across thin films produced by physical vapor deposition requires a comprehensive understanding of a variety of techniques including thermal and e-beam evaporation as well as sputtering. Characteristics including flux density and distribution, the effects of process pressure, adatom energies, target and substrate biases, throw distance and substrate manipulation must all be considered. System-dependent features including deposition system design and source-to-substrate orientation will be discussed. Several approaches to monitor and measure thin film thickness, in-situ and post deposition, will be included with examples. In this webinar, Lesker experts will review fundamental characteristics of a variety of standard physical vapor deposition techniques and strategies to insure thickness uniformity across a range of substrate sizes.

Duration: 1 Hour(s)

Expert(s): Paul Sullivan

Paul Sullivan is a Research Technologist in our Process Equipment Division with a specialty in organic thin film deposition. He is an organic electronics expert with more than 10 years of research experience in the field of organic photovoltaics and organic LED's. He has more than 25 publications on organic electronics in high-impact technical journals. He has extensive knowledge of vacuum-enable thin film processing and is currently focused on the development of novel deposition techniques for future organic electronic devices.



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