Representative Image
Alicat MCE and MCV Mass Flow Controllers (MFC)
Mass flow controllers are a pivotal tool when it comes to any process, which means that you need something fast, reliable, and accurate. The Alicat MCE and MCV Pressure-based Mass Flow Controllers provide a large control range (0.01-100%), fast sensor response time (<1 ms), and an exceptional accuracy. With a plethora of additional options and customizations including different electrical connections and communication protocols, the Alicat Mass Flow Controller line will provide everything that you need to ensure that your vacuum process runs smoothly.
Eigenschaften und Vorteile
- ±0.6% of reading or ±0.1% of full scale, whichever is greater
- Wide control range of 0.01-100% of full scale on most devices
- Multi gas compatibility
- Multi-variate measurement (Pressure, Temperature, Mass flow and Volumetric flow)
- Inbuilt display
- < 1 ms sensor response time
- Typical control response time of 30 ms
- No warm-up time
- Industrial protocols available
- Pressure and temperature compensation
- Matching footprint to other MFC OEMs
Bemaßte Zeichnungen
Spezifikationstabelle
| Typ | MCE - Standard | MCES - Corrosive | MCV - Standard w/ positive shut-off valve | MCVS - Corrosive w/ positive shut-off valve |
|---|---|---|---|---|
| Flussregelbereiche (Voll-Skala) | 1 - 20.000 sccm | 1 - 20.000 sccm | 1 - 20.000 sccm | 1 - 20.000 sccm |
| Maximaler Eingangsdruck | 145 psig | 145 psig | 145 psig | 145 psig |
| Normaler Betrieb | 175 psia | 175 psia | 175 psia | 175 psia |
| Druckdifferenzial | 75 psid | 75 psid | 75 psid | 75 psid |
| Prüfdruck | 175 psig | 175 psig | 175 psig | 175 psig |
| Steuerbereich | 0,01 % to 100% Full Scale / 200:1 Turndown | 1% to 100% Full Scale / 100:1 Turndown | 0,01 % to 100% Full Scale / 200:1 Turndown | 1% to 100% Full Scale / 100:1 Turndown |
| Typical Accuracy after tare | ± (0,6 % of Reading or 0,1 % of Full Scale), whichever is greater | ± (0,8 % of Reading + 0,2 % of Full Scale) | ± (0,6 % of Reading or 0,1 % of Full Scale), whichever is greater | ± (0,8 % of Reading + 0,2 % of Full Scale) |
| Typical Response time | 100 msec (adjustable) | 100 msec (adjustable) | 100 msec (adjustable) | 100 msec (adjustable) |
| Wiederholgenauigkeit | ± 0,2 % of Full Scale | ± 0,2 % of Full Scale | ± 0,2 % of Full Scale | ± 0,2 % of Full Scale |
| Aufwärmzeit | No warm-up time | No warm-up time | No warm-up time | No warm-up time |
| Betriebstemperaturbereich | -10 °C bis 60 °C | -10 °C bis 60 °C | -10 °C bis 60 °C | -10 °C bis 60 °C |
| Lagerfeuchtigkeit | 0 to 100% Relative Humidity, Non-Condensing | 0 to 100% Relative Humidity, Non-Condensing | 0 to 100% Relative Humidity, Non-Condensing | 0 to 100% Relative Humidity, Non-Condensing |
| External Leak Rate | 1e-9 atm-cc/sec | 1e-8 atm-cc/sec | 1e-9 atm-cc/sec | 1e-8 atm-cc/sec |
| Internal Leak Rate (leak through) | 1e-5 atm-cc/sec with zero set point | 1e-5 atm-cc/sec with zero set point | 1e-9 atm-cc/sec (due to additional Swagelok shutoff valve) | 1e-9 atm-cc/sec (due to additional Swagelok shutoff valve) |
| erforderliche Eingangsleistung | +12 to +30 VDC | +12 to +30 VDC | +12 to +30 VDC | +12 to +30 VDC |
| Selectable Gases | 98 standard gases | 128 gases, includes corrosives | 98 standard gases | 128 gases, includes corrosives |
| Electrical Connector Options | 8-Pin Mini-DIN / 9-pin D-sub (DB9) / 15-pin D-sub (DB15) | 8-Pin Mini-DIN / 9-pin D-sub (DB9) / 15-pin D-sub (DB15) | 8-Pin Mini-DIN / 9-pin D-sub (DB9) / 15-pin D-sub (DB15) | 8-Pin Mini-DIN / 9-pin D-sub (DB9) / 15-pin D-sub (DB15) |
| Digital Input / Output Options | RS-232 Serial / RS-485 Serial / Modbus RTU / PROFIBUS / EtherNet/IP / DeviceNet / Modbus TCP/IP / EtherCAT | RS-232 Serial / RS-485 Serial / Modbus RTU / PROFIBUS / EtherNet/IP / DeviceNet / Modbus TCP/IP / EtherCAT | RS-232 Serial / RS-485 Serial / Modbus RTU / PROFIBUS / EtherNet/IP / DeviceNet / Modbus TCP/IP / EtherCAT | RS-232 Serial / RS-485 Serial / Modbus RTU / PROFIBUS / EtherNet/IP / DeviceNet / Modbus TCP/IP / EtherCAT |
| Analogausgang | 0-5 VDC / 0-10 VDC / 1-5 VDC / 4-20 mA | 0-5 VDC / 0-10 VDC / 1-5 VDC / 4-20 mA | 0-5 VDC / 0-10 VDC / 1-5 VDC / 4-20 mA | 0-5 VDC / 0-10 VDC / 1-5 VDC / 4-20 mA |
| Integrated Display | Ja | Ja | Ja | Ja |
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Konfigurationsoptionen
Beispiel für den Bestellcode: KJLMCEA1AAA1
| Einheit | Code | Konfiguration |
| Standard | KJLMCE | KJLMCE |
| Korrosiv | KJLMCES | |
| Standard w/ Positive Shut-Off Valve | KJLMCV | |
| Corrosive w/ Positive Shut-Off Valve | KJLMCVS | |
| Bereich | Code | Konfiguration |
| 0,5 sccm | A | A |
| 1 sccm | B | |
| 2 sccm | C | |
| 5 sccm | D | |
| 10 sccm | E | |
| 20 sccm | F | |
| 50 sccm | G | |
| 100 sccm | H | |
| 200 sccm | I | |
| 500 sccm | J | |
| 1 slpm | K | |
| 2 slpm | L | |
| 5 slpm | M | |
| 10 slpm | O | |
| 20 slpm | P | |
| Anschlussstück | Code | Konfiguration |
| 4 VCR | 1 | 1 |
| 4VCO | 2 | |
| 4COMP | 3 | |
| Pinout | Code | Konfiguration |
| DB9 (Alicat) | A | A |
| 8 STIFT | B | |
| DB9K | C | |
| DB15K | D | |
| Protocol | Code | Konfiguration |
| Analog/RS485 | A | A |
| DeviceNet | D | |
| EtherNet/IP | E | |
| EtherCAT | C | |
| Modbus | M | |
| Profibus | P | |
| Anzeige | Code | Konfiguration |
| Ja | A | A |
| Nein | B | |
| Ausgang | Code | Konfiguration |
| 0-5 VDC | 1 | 1 |
| 0-10 VDC | 2 | |
| 4-20 mA | 3 | |
| 1-5V | 4 |
Gas List
Your Alicat is preloaded with gas properties data for the following gases:
Pure Non-Corrosive Gases
- Acetylene (C2H2)
- Air (Clean Dry)
- Argon (Ar)
- Isobutane (i-C4H10)
- Normal Butane (n-C4H10)
- Carbon dioxide (CO2)
- Carbon monoxide (CO)
- Deuterium (D2)
- Ethane (C2H6)
- Ethylene (Ethene) (C2H4)
- Helium (He)
- Hydrogen (H2)
- Krypton (Kr)
- Methane (CH4)
- Neon (Ne)
- Nitrogen (N2)
- Nitrous Oxide (N2O)
- Oxygen (O2)
- Propane (C3H8)
- Sulfur Hexafluoride (SF6)1
- Xenon (Xe)
Breathing Gases
- Metabolic Exhalant
- EAN-32
- EAN-36
- EAN-40
- EA-40
- EA-60
- EA-80
- Heliox-20
- Heliox-21
- Heliox-30
- Heliox-40
- Heliox-50
- Heliox-60
- Heliox-80
- Heliox-99
Bioreactor Gas Mixes
- 5%–95% CH4/CO2 in 5% increments
Refrigerants2
- R-113
- R-14
- R-223
- R-233
- R-323
- R-1153
- R-116
- R-1243
- R-1253
- R-134a3
- R-142b3
- R-143a3
- R-152a
- R-318
- R-404A3
- R-407C3
- R-410A3
- R-507A3
Welding Gases
- C-2
- C-8
- C-10
- C-15
- C-20
- C-25
- C-50
- C-75
- He-25
- He-50
- He-75
- He-90
- A 1025
- Stargon CS
Chromatography Gas Mixes
- P-5
- P-10
Oxygen Concentrator Gas Mixes
- 89% O2, 7% N2, 4% Ar
- 93% O2, 3% N2, 4% Ar
- 95% O2, 1% N2, 4% Ar
Stack/Flue Gas Mixes
- 2.5% O2, 10.8% CO2, 85.7% N2, 1% Ar
- 2.9% O2, 14% CO2, 82.1% N2, 1% Ar
- 3.7% O2, 15% CO2, 80.3% N2, 1% Ar
- 7% O2, 12% CO2, 80% N2, 1% Ar
- 10% O2, 9.5% CO2, 79.5% N2, 1% Ar
- 13% O2, 7% CO2, 79% N2, 1% Ar
Laser Gas Mixes
- 4.5% CO2, 13.5% N2, 82% He
- 6% CO2, 14% N2, 80% He
- 7% CO2, 14% N2, 79% He
- 9% CO2, 15% N2, 76% He
- 9.4% CO2, 19.25% N2, 71.35% He
- 9% Ne, 91% He
Fuel Gas Mixes
- Coal Gas 50% H2, 35% CH4, 10% CO, 5% C2H4
- Endothermic Gas 75% H2, 25% N2
- HHO 66.67% H2, 33.33% O2
- LPG HD-5 96.1% C3H8, 1.5% C2H6, 0.4% C3H6 , 1.9% n-C4H10
- LPG HD-10 85% C3H8, 10% C3H6, 5% n-C4H10
Natural Gases
- 93% CH4, 3% C2H6, 1% C3H8, 2% N2, 1% CO2
- 95% CH4, 3% C2H6, 1% N2, 1% CO2
- 95.2% CH4, 2.5% C2H6, 0.2% C3H8, 0.1% C4H10, 1.3% N2, 0.7% CO2
Synthesis Gases
- 40% H2, 29% CO, 20% CO2, 11% CH4
- 64% H2, 28% CO, 1% CO2, 7% CH4
- 70% H2, 4% CO, 25% CO2, 1% CH4
- 83% H2, 14% CO, 3% CH4
Pure Corrosive Gases2
- Ammonia (NH3)
- Butylene (1-Buten)
- Cis-Butene (c-Buten)
- Isobutane (i-Buten)
- Trans-Butene (t-Buten)
- Carbonyl Sulfide (COS)
- Chlorine (Cl2)4
- Dimethylether (DME)
- Hydrogen Sulfide (H2S)
- Nitrogen Trifluoride (NF3)
- Nitric Oxide (NO)
- Propylene (C3H6)
- Silane (SiH4)
- Sulfur Dioxide (SO2)4
1 Sulfur hexafluoride is a highly potent greenhouse gas monitored under the Kyoto Protocol
2 S-series units only
3 Under the Montreal Protocol and Kigali Amendment, the production and consumption of these ozone-depleting substances (ODS) is being or has been phased out. It is recommended you ensure compliance with this universally ratified treaty before attempting to use these gases, in addition to R113, R-123, and R-141b
4 S-series with PCA valves only
Downloads und Dokumente
View information regarding your product.
Manuals
Datenblätter
Spec Sheets
Start Your Custom Configuration
Bestelltabelle
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| Typ | Beschreibung | Dichtung | Fluss Bereich | Anschlüsse | Anschlüsse | Schnittstelle | Ausgang | Teilenummer | Preis | Auf Lager | Artikel hinzufügen | |
|---|---|---|---|---|---|---|---|---|---|---|---|---|
| Typ | Beschreibung | Dichtung | Fluss Bereich | Anschlüsse | Anschlüsse | Schnittstelle | Ausgang | Teilenummer | Preis | Auf Lager | Artikel hinzufügen | |
| N2 |
MASSENFLUSSREGELUNNG, |
Elastomer | 100 SCCM | DB9M / Barrel (power) | 4 VCR | Analog / RS485 | 0 to 5 VDC |
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| N2 |
MASSENFLUSSREGELUNNG, |
Elastomer | 1000 SCCM | DB9M / Barrel (power) | 4 VCR | Analog / RS485 | 0 to 5 VDC |
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| N2 |
MASSENFLUSSREGELUNNG, |
Elastomer | 2000 SCCM | DB9M / Barrel (power) | 4 VCR | Analog / RS485 | 0 to 5 VDC |
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| N2 |
MASSENFLUSSREGELUNNG, |
Elastomer | 5000 SCCM | DB9M / Barrel (power) | 4 VCR | Analog / RS485 | 0 to 5 VDC |
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Zubehörtabelle
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| Beschreibung | Reference | Typ | Teilenummer | Preis | Auf Lager | Artikel hinzufügen | |
|---|---|---|---|---|---|---|---|
| Beschreibung | Reference | Typ | Teilenummer | Preis | Auf Lager | Artikel hinzufügen | |
| — | Cable, DB9F to DB9F, 10ft. | Kabel |
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| — | Cable, DB15F to DB15F, 15ft. | Kabel |
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| — | Cable, DB9F to Blunt Cut, 10ft. | Kabel |
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| — | Cable, DB9F to Blunt Cut, 3ft. | Kabel |
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| — | Cable, DB9F to Blunt Cut, 6ft. | Kabel |
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| — | Cable, DB9F to 6-pin Ind | Kabel |
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| — | Cable, DB15F to Blunt Cut, 15ft. | Kabel |
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| — | Cable, 8 Pin to Blut Cut, 100ft. | Kabel |
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| — | Cable, 8 Pin to Blunt Cut, 25ft. | Kabel |
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| — | Cable, Double Ended 8 Pin Din, Connection to BB3 & BB9, 3ft. | Kabel |
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| — | Cable, 8 Pin to Blunt Cut, 50ft. | Kabel |
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| — | Cable, 8 Pin to Blunt Cut, 6ft. | Kabel |
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| — | Cable, Double Ended 8 Pin Din, Connection to BB3 & BB9, 6ft. | Kabel |
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| — | Cable, 8 Pin to Blunt Cut, 75ft. | Kabel |
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IN-LINE FILTER, |
In-Line Filter, 1/8" NPT, 20 Microns | Filter |
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| — | Universal High Current Power Supply | Netzteil |
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NETZGERÄT, |
Universal Power Supply | Netzteil |
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| — | Universal Power Supply for Micro-USB | Netzteil |
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| — | BB3 RS232 Breakout Bow for 3 MFCs, Power & Communication, 8 Pin Din Connector, Cables & Power Supply Not Included | Power Supply / Communication |
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| — | BB3 RS232 Breakout Box Kit, 8 Pin Connectors, Includes BB3, 3x 6ft. 8 Pin Cable for Digital Com & Power, & Universal Power Supply | Power Supply / Communication |
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| — | BB9 RS232 Breakout Bow for 9 MFCs, Power & Communication, 8 Pin Din Connector, Cables & Power Supply Not Included | Power Supply / Communication |
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| — | Software for Gas Mixtures, Up to 10 Units | Software |
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| — | Software for Up to 26 Units, RS232 Or RS485 | Software |
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